METHOD OF MANUFACTURING ELECTRONIC GRADE TETRAETHOXYSILANE FOR MINIMIZING CHLORINE CONTENT

摘要

The present invention relates to a method for producing an electronic grade tetraethoxysilane capable of minimizing the chlorine content, and more particularly, to the gaseous hydrogen chloride produced by reacting silicon tetrachloride and ethanol during tetraethoxysilane production. The mixture of ethoxychlorosilanes, which are intermediate products, and hydrogen chloride and unreacted ethanol, by-products was refluxed and distilled, and ethanol was additionally added to remove hydrogen chloride distilled with ethanol. Reaction can be converted to tetraethoxysilane, the content of chlorine contained in the product can be reduced to reduce the amount of neutralizing agent required for neutralization, and thus an economical method for producing an improved electronic grade tetraethoxysilane will be.