FABRICATION APPARATUS OF MICRO-STRUCTURE FOR REMOVING TRANSIENT AREA OF INCLINED X-RAY EXPOSURE AND FABRICATION METHOD THEREOF

摘要

The present invention using a LIGA process discloses a device and a method for forming an inclined surface in the fine structure consisting of the photosensitive polymer. The present invention in further detail will eliminate the exposure light source of X-rays for the transition region of the can to remove a portion having a non-uniform intensity X-ray gradient exposure with a fine structure by forming an inclined surface in the fine structure by vertically exposed to X-ray mask It discloses an apparatus and a method for.