Thermal micro actuator capable of amplifying displacement and method of manufacturing the same

摘要

PURPOSE: A thermal micro actuator and a method for fabricating the same are provided to amplify displacement of the thermal micro actuator by installing an arch bar at end portions of two arch bars. CONSTITUTION: A thermal micro actuator includes a substrate(50). A first electrode(51), a ground electrode(52) and a second electrode(53) are fixed to the substrate(50) in such a manner that they are parallel spaced by a predetermined distance. A first arch bar(54) extends from the first electrode(51) and the ground electrode(52). A second arch bar(55) extends from the second electrode(53) and the ground electrode(52). A third arch bar(56) extends from end portions of the first and second arch bars(54,55). A front section(58) extends from a center(57) of the third arch bar(56).