PLASTIC-BASED MICROFABRICATED THERMAL DEVICE, MANUFACTURING METHOD THEREOF, DNA AMPLIFICATION CHIP USING THE PLASTIC-BASED MICROFABRICATED THERMAL DEVICE, AND METHOD FOR MANUFACTURING THE DNA AMPLIFICATION CHIP

摘要

Provided are a microfabricated thermal device using a thin plastic substrate, a manufacturing method thereof, a silicon micro-chamber, a double-stranded deoxyribonucleic acid (DNA) amplification chip employing the microfabricated thermal device and the silicon micro-chamber, and a manufacturing method thereof, and a DNA amplification chip array, and a method for manufacturing the DNA amplification chip array. The microfabricated thermal device using a thin plastic substrate can be used for DNA amplification, i.e., a polymerase chain reaction (PCR), which is essential to DNA related diagnosis and analysis. The plastic-based microfabricated thermal device, includes: a plastic substrate; a heating unit disposed on the top surface of the plastic substrate to supply heat to the plastic substrate; a sensing unit disposed on the top surface of the plastic substrate to detect heat; and a diffusing unit disposed on the bottom surface of the plastic substrate to diffuse heat to the plastic substrate.