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A PLASTIC BASED MICROFABRICATED THERMAL DEVICE AND A METHOD FOR MANUFACTURING THE SAME, AND A DNA AMPLIFICATION CHIP AND A METHOD FOR MANUFACTURING THE SAME USING THE SAME
A PLASTIC BASED MICROFABRICATED THERMAL DEVICE AND A METHOD FOR MANUFACTURING THE SAME, AND A DNA AMPLIFICATION CHIP AND A METHOD FOR MANUFACTURING THE SAME USING THE SAME
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机译:基于塑料的微细热设备及其制造方法,DNA扩增芯片和使用该方法制造其的方法
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摘要
A plastic-based microfabricated thermal device, a method for manufacturing the same device are provided to reduce the production costs of the device while temperature of substrate is uniformly controlled with low power compared to silicon or glass. A plastic-based microfabricated thermal device comprises: a plastic substrate(11); a heating tool which is formed on the upper side of plastic substrate, heats the plastic substrate and contains a heater(12A), an electrode(12C) and pads(12D, 12E) for supplying electric source to the heater through the electrode; a sensing tool(12B) which is formed on the upper side of plastic substrate and detects heat; and a diffusion tool(12F) which is formed in the rear side of the plastic substrate and diffuses heat to the plastic substrate, and further comprises an insulating membrane(13A) for covering the heating tool, sensing tool and diffusion tool in the upper and rear sides of substrate. The DNA amplification chip contains the plastic-based microfabricated thermal device, a silicon micro chamber which has a concave portion and is conjugated to the plastic-based microfabricated thermal device, and a cover for forming a reaction chamber by covering the concave portion.
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