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THICK FILM PHOTORESIST LAYER LAMINATE, METHOD OF MANUFACTURING THICK FILM RESIST PATTERN, AND METHOD OF MANUFACTURING CONNECTING TERMINAL
THICK FILM PHOTORESIST LAYER LAMINATE, METHOD OF MANUFACTURING THICK FILM RESIST PATTERN, AND METHOD OF MANUFACTURING CONNECTING TERMINAL
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机译:厚膜光刻胶层合板,厚膜光刻胶图案的制造方法以及连接端子的制造方法
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摘要
In the thick film photoresist layer used in the production of the connection terminal or the like, the resist composition reacts with high sensitivity, there is provided a means to form a resist pattern with high precision. (A) a support and, (b) the thick film photoresist layer to an alkali-soluble contains a resin and an acid generator which is changed by the action of an acid, the (a) contact of the substrate and the (b) the thick film photoresist layer using the interference (c) a thick film photoresist layer laminate that is laminated with a shield layer to form a resist pattern, and using this to form a connection terminal.
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