Growth method for vertically aligned carbon nanotubes by changing the morphologies of a transition metal thin films

摘要

The present invention describes a diameter of the CNT is grown in a vertical, density and metastases in a length adjustable at will by the surface shape of the metal thin film to control the carbon nanotube growth method by controlling the surface shape of the transition metal thin film. The method comprising the transition vertical growth process of carbon nanotubes by metal thin-film formation control according to the present invention includes (a) depositing a transition metal thin film on the substrate while controlling the shape and size of crystals in the desired size and shape to be formed; And a; and (b) growing carbon nanotubes on the transition metal thin film the deposited. First, the (a) substrate preparation method of the step is usually the case of using a sputter controlling the sputtering power density was changed, or the deposition temperature or the heat treatment temperature to adjust the grain size and density of Ni, Co, Fe or their mixtures. Next, the (B) step of the synthesis the deposition of the carbon nanotubes is methane gas, acetylene gas as a silicon substrate or a glass substrate moved a transition metal thin film deposited over in the reactor a plasma chemical vapor deposition or thermal chemical vapor deposition method, an ethylene gas, propane gas, etc. of by flowing within the hydrocarbon gas into the reaction, thereby growing the carbon nanotubes on the catalytic metal film.