of;
Mechanical;
Engineering,;
Massachusetts;
Institute;
of;
Technology,;
77;
Massachusetts;
Ave,;
Cambridge;
MA;
02139,;
USA;
Core;
Research;
Center;
for;
Hybrid;
Materials;
Solution,;
Pusan;
National;
University,;
Busan;
609-735,;
Korea;
碳纳米管; 垂直排列; 纳米纤维; 等离子体增强化学气相沉积; 生长; 氨气; 高分辨透射电子显微镜; 等离子蚀刻;