CARBON NANOCOMPOSITE THIN FILM AND FABRICATION METHOD THEREOF BY NANOSIZED METAL DOTS

摘要

PURPOSE: To provide a method for fabricating a rigid carbon nanocomposite thin film comprising a nano sized graphite phase material in a diamond-like amorphous carbon thin film by depositing carbon after forming nano-dots of reactive materials, a rigid carbon nanocomposite thin film fabricated by the method, and a method for controlling size of graphitized portion by controlling size of metal dots. CONSTITUTION: In a rigid carbon thin film comprising a diamond-like amorphous carbon thin film having high electrical resistance and low electrical conductivity, and a graphite phase portion having low electrical resistance and high electrical conductivity formed to a nano-size formed in the diamond-like amorphous carbon thin film, the rigid carbon nanocomposite thin film is characterized in that it is consisted of the same element and has partially different electrical conductivity.