Resonator with high peak power and the combination of several of these optical resonators, intended in particular for the excitation light generator in the extreme ultraviolet

摘要

1.an optical resonator with u0442u0432u0435u0440u0434u043eu0442u0435u043bu044cu043du043eu0439 u0443u0441u0438u043bu0438u0442u0435u043bu044cu043du043eu0439 environment with pulse mode, and u043du0430u043au0430u0447u043au0443 this optical resonator provided with n u0435u043fu0440u0435u0440u044bu0432u043du043e working diodes, and u043eu0442u043bu0438u0447u0430u044eu0449u0438u0439u0441u00a0 that contains at least two laser u0441u0442u0435u0440u0436u043du00a0, at least one tool u0432u043au043bu044eu0447u0435u043du0438u00a0 light impulses, etc. i'll bring it a u0432u043au043bu044eu0447u0435u043du0438u00a0 installed in part of the resonatorin which a laser beam generated by the resonator, has the lowest degree of u0440u0430u0441u0445u043eu0436u0434u0435u043du0438u00a0, and two mirrors, which limit the resonator, one of which is high u043eu0442u0440u0430u0436u0430u0442u0435u043bu044cu043du0443u044e ability and the other is partially reflecting.;2. an optical resonator for the laser rod 1, which is made of a u0438u0437u043eu0442u0440u043eu043fu043du043eu0433u043e material, such as nd: yag or yb: yag and volumetric resonator also contains environments the government of the u043fu043eu043bu00a0u0440u0438u0437u0430u0446u0438u0438 installed in the path of the beam in each of the spaces formed u0434u0432u0443u043cu00a0 consistently established u0441u0442u0435u0440u0436u043du00a0u043cu0438 and er the turn of, preferably, u0441u043eu0441u0442u0430u0432u043bu00a0u0435u0442 90.;3. an optical resonator for 1, also containing, preferably, u0440u0430u0441u0441u0435u0438u0432u0430u044eu0449u0443u044e lens installed in the middle of each interval between u0434u0432u0443u043cu00a0 neighbouring u0441u0442u0435u0440u0436u043du00a0u043cu0438.;4. an optical resonator for 1, in which the laser material, which made the laser rods, chosen from the group consisting of nd: yag, nd: YLF, nd: YALO, yb: yag, nd: ScO3 and yb: item.;5. an optical resonator for 1, containing two u0441u0442u0435u0440u0436u043du00a0 (38u0430, 38b), preferably constructed of essentially identical laser material, and a corner square u043eu0441u043au043eu0441u0442u0438 u043fu043eu043bu00a0u0440u0438u0437u0430u0446u0438u0438 installed in the u0440u0435u0437u043eu043du0430u0442u043eu0440u0435 between these u0434u0432u0443u043cu00a0 u0441u0442u0435u0440u0436u043du00a0u043cu0438.;6. an optical resonator for 3, in which a u0432u043au043bu044eu0447u0435u043du0438u00a0 pulses, each pulse of the optical u0440u0435u0437u043eu043du0430u0442u043eu0440u0435 contains two u043cu043eu0434u0443u043bu00a0u0442u043eu0440u0430 q-switched laser located in the u0440u0435u0437u043eu043du0430u0442u043eu0440u0435 on each side of the vehicle u043fu043eu043bu00a0u0440u0438u0437u0430u0446u0438u0438 between a rotation plane and the laser u043fu043eu043bu00a0u0440u0438u0437u0430u0446u0438u0438 lake sterzh u043du00a0u043cu0438.;7. an optical resonator for 1, in which means (50, 52) u0432u043au043bu044eu0447u0435u043du0438u00a0 u043fu0440u0435u0434u0441u0442u0430u0432u043bu00a0u0435u0442 a u0430u043au0443u0441u0442u043eu043eu043fu0442u0438u0447u0435u0441u043au043eu0433u043e type.;8. an optical resonator for 1, which is connected to the one or more u0443u0441u0438u043bu0438u0442u0435u043bu00a0u043cu0438 with one passage.;9. laser device, u043eu0442u043bu0438u0447u0430u044eu0449u0435u0435u0441u00a0 that contains at least three pulse optical resonator (2, 4, 6) for p.1, and a means (14) of the light pulses essentially in one place on the target (16) and, in essence, at the same time, in this place, and so that the device contains a means (18) u0443u043fu0440u0430u0432u043bu0435u043du0438u00a0 optical u0440u0435u0437u043eu043du0430u0442u043eu0440u0430u043cu0438 with the impulse response, which is a u0443u043fu0440u0430u0432u043bu0435u043du0438u00a0 implemented so that all funds u0432u043au043bu044eu0447u0435u043du0438u00a0, u0432u0445u043eu0434u00a0u0449u0438u0435 in sos taw devices operate synchronously.;10. device for the p.9, containing at least u0434u0435u0441u00a0u0442u044c pulse optical u0440u0435u0437u043eu043du0430u0442u043eu0440u043eu0432 (2, 4, 6) mounted in parallel.;11. device for the p.9, which means the transfer of light pulses includes a means (80, 82, 90, 92) of the light pulses at the target (16) in the same way.;12. device for the p.9, also contains a means (74, 76, 78) modification of the spatial u0440u0430u0441u043fu0440u0435u0434u0435u043bu0435u043du0438u00a0 luminous energy of a light and u0441u043bu043eu0436u0435u043du0438u00a0 u043cu043fu0443u043bu044cu0441u043eu0432 originating from exits the optical u0440u0435u0437u043eu043du0430u0442u043eu0440u043eu0432.;13. device for the p.9, in which means (18) u0443u043fu0440u0430u0432u043bu0435u043du0438u00a0 optical u0440u0435u0437u043eu043du0430u0442u043eu0440u0430u043cu0438 also u043fu043eu0437u0432u043eu043bu00a0u0435u0442 modify the distribution of the light pulse, get oh by the u0441u043bu043eu0436u0435u043du0438u00a0 light pulses originating from exits the optical u0440u0435u0437u043eu043du0430u0442u043eu0440u043eu0432, u0434u043bu00a0 u0444u043eu0440u043cu0438u0440u043eu0432u0430u043du0438u00a0 composite pulses.;14. device for p.13, in which the profile of each composite pulse includes a first pulse u0432u043eu0441u043fu043bu0430u043cu0435u043du0435u043du0438u00a0 plasma, u043au043eu0442u043eu0440u0430u00a0 u043eu0431u0440u0430u0437u0443u0435u0442u0441u00a0 by u0432u0437u0430u0438u043cu043eu0434u0435u0439u0441u0442u0432u0438u00a0 light u0438u043cu043fu0443u043bu044cu0441u043e in the end, the time interval during which the u0441u0432u0435u0442u043eu0432u0430u00a0 u044du043du0435u0440u0433u0438u00a0, u043fu043eu0434u0430u0432u0430u0435u043cu0430u00a0 out laser is minimal during the growth of plasma, and then the second pulse is out of several basic impulsesin accordance with the sequence of u043au043eu0442u043eu0440u0430u00a0 depends on the growth of plasma.;15. device for the p.9, also contains a means (18) u043fu043eu0432u0442u043eu0440u0435u043du0438u00a0 modification frequency light pulses produced by these optical u0440u0435u0437u043eu043du0430u0442u043eu0440u0430u043cu0438, or sequence of er these light pulses produced by these optical u0440u0435u0437u043eu043du0430u0442u043eu0440u0430u043cu0438.;16. device for u043fu043eu0437u0432u043eu043bu00a0u044eu0449u0435u0435 p.13, sending to the first beam (f1) with a high degree of u0444u043eu043au0443u0441u0438u0440u043eu0432u0430u043du0438u00a0 and then apply to the rest of the world with more energy. u0438u0440u043eu043au043eu0439 u0444u043eu043au0443u0441u0438u0440u043eu0432u043au043eu0439.;17. device for the p.9, in which the target (16) is designed u0434u043bu00a0 u0433u0435u043du0435u0440u0438u0440u043eu0432u0430u043du0438u00a0 in extreme ultraviolet light area by the u0432u0437u0430u0438u043cu043eu0434u0435u0439u0441u0442u0432u0438u00a0 with light emitter , u0438u0437u043bu0443u0447u0430u0435u043cu044bu043cu0438 optical u0440u0435u0437u043eu043du0430u0442u043eu0440u0430u043cu0438 (2, 4, 6).