Micromechanical device for analyzing or classifying gaseous or liquid chemical substances comprises a radiation source emitting radiation in the infrared region, and sensor elements for detecting the radiation with optical filter elements

摘要

Micromechanical device comprises a radiation source emitting radiation in the infrared (IR) region, and sensor elements for detecting the IR radiation with optical filter elements (19). The filter elements each have a different transmission behavior. Analysis or classification of chemical substances is carried out based on the electrical output signals of the sensor elements.