Detector system for a scanning electron microscope and a scanning electron microscope with a corresponding detector system

摘要

The present invention relates to a detector system, for the sample chamber of a scanning electron microscope, with the which signals are simultaneously detected in transmission, which correspond to a light field contrast and a dark field contrast. The detector system (14) has, for this purpose, in a plane (25) four detectors (15 - 18), between which there is a hole (19) for a free passage of electrons is. Behind this hole (19), in a second plane (26) a further detector (27) is arranged. The detectors are preferably diodes. The detectors (15, 16, 17, 18) in the first plane (25), the samples is in more detail, are used for the generation of signals which correspond to a dark field contrast. The further, samples further detector (27) is detected signals, which correspond to a light field contrast. Due to the offset arrangement of four diodes (15, 16, 17, 18) in the first plane (25) can be greater for electrons insensitive dead spaces between the diodes and around the hole (19) to avoid around.