Detector system for a scanning electron microscope and a scanning electron microscope with a corresponding detector system

摘要

Detector system, for scanning electron microscopes with four it (15, 16, 17, 18), which in a first plane (25) are arranged, wherein the four it (15, 16, 17, 18) rectangular or square for electrons sensitive surfaces and are arranged offset to one another, so that between the it is also a square hole (19) for a free passage of an electron beam is present, and with a further electron detector (27), which in a second, to the first plane (25) spaced plane (26), centrally with respect to the hole (19) between the four it (15, 16, 17, 18) is arranged in the first plane.