Drive method for piezoelectric actuators for micro-positioning systems, by using switchable bypass to digital-analog converter of maximum resolution

摘要

To reduce latency times in the feed-forward branch of a sampling system, the signal for a control variable reaches a highest-resolution D/A converter via a switchable bypass. The D/A converter is operated at the sampling rate of the sampling system. The feed-forward path leads to a rapid D/A converter which is driven independent of the sampling system. An independent claim is included for a circuit for accurate, dynamic digital control of piezo-actuators.