Method and system for controlling the chemically - mechanical polishing, with the use of a sensor signal of a cushion position ierers conditioned

摘要

In a system and method according to the present invention, a sensor signal, for example a motor current signal, of a drive arrangement of a pad conditioning system, are used in order to control a cmp - system, so that a change in the state of consumable materials to be compensated for, as a result of which the process stability is improved.