Testing device for wafer testing of digital semiconductor circuits with signal amplifiers inserted in test signal channels for eliminating signal attentuation and noise

摘要

The testing device has a probe card (3) used with a test head (4) for testing digital semiconductor circuits within a wafer (1), by supplying test signals to and from the latter via an interposer (10) with a needle or contact pin card provided by an adapter (2). A digital signal amplifier is inserted in each test signal channel or in the time critical test signal channels.