Differential thermal analysis of mixed metallic oxide materials, e.g. indium-tin oxides for semiconductor manufacture to determine metal contents

摘要

A weighed sample of test material together with a separate inert reference sample is heated in a micro difference-calorimeter, at a constant rate of temperature rise, and the temperature difference between the test and reference samples is recorded. From calibration with a material of known accurate thermodynamic data a heat flux curve is generated from the temperature differential curve.