Sensor for determining fluid flow, has fluid channel in functional layers to guide fluid flow, and insulation layer at its walls, where fluid flow is determined based on resistance value of layers in measurement zone

摘要

The sensor has a fluid channel (3) in functional layers (6, 7) to guide a fluid flow, and insulation layer at its walls. A heating zone and a measurement zone (9) are provided near the channel. The sensor is connected for passing heating current through the layers in the heating zone and for measuring a resistance value of the layers in the zone (9). The fluid flow is determined based on the measured resistance value. An independent claim is also included for a method of manufacturing a sensor.