Dispersion to the chemically - mechanical polishing of metal surfaces containing metal oxide particles and a cationic polymer

摘要

An aqueous dispersion for chemically - mechanical polishing of surfaces, comprising a metal oxide powder and a cationic, surface-active polymer, wherein the metal oxide powder, silicon dioxide, aluminum oxide or a mixed oxide of silicon dioxide and aluminum oxide, and the cationic surface-active polymer dissolved in the dispersion is present a polyallylamine or poly diallyl amine with a mass mean molecular weight of less than 100000 g / mol is.The dispersion can be used for chemically - mechanical polishing of metallic layers and of metal films, which are applied on an insulating barrier layer.