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discussion messteilung

机译:计量部门的讨论

摘要

A supportive substrate (11) carries areas of first and second types (12, 13). The first type (12) comprises layers (15, 16) of differing refractive index (n1, n2) acting as an interference filter. The second type (13) comprise an absorption layer (14) of low reflectivity, on the substrate. An Independent claim is included for the method of manufacture of the device. A first, low refractive index layer is applied to the substrate and structured to differentiate the areas. Over the entire area, a second layer is applied. This has a markedly greater refractive index than the first layer. Preferred features: The reflective substrate is polished steel. The absorbing layer and the uppermost layer (16) of the highly reflective region (12) are comprised of identical materials. Material of the absorbing and reflective layers, has an absorption coefficient k of 0.1-0.5. Layers (15, 16) of the highly-reflective regions have considerably differing refractive index, the first layer (15) being directly on the reflective substrate, and having the smaller refractive index (n1). The second of these layers has a refractive index n2, no less than 2.2. Thickness d2 of the second layer (16) is 30 - 50 nm. Refractive index of the first layer is between 1.3 and 1.7. Thickness of the first layer is 100-150 nm. The highly-reflective region has a dielectric reflection-interference filter construction. PVD (plasma vapor deposition) is employed for overall coating, photolithography being employed for structuring. The second layer is produced by PVD. In a first stage, the substrate is completely coated with a photo-lacquer. This is structured, leaving regions with and without this coating. To structure the first layer after lacquering, regions are removed where photo-lacquer and the first layer coexist.
机译:支撑衬底(11)承载第一和第二类型的区域(12、13)。第一种类型(12)包括用作干涉滤光片的具有不同折射率(n1,n2)的层(15、16)。第二类型(13)在基板上包括低反射率的吸收层(14)。该设备的制造方法包括独立权利要求。第一低折射率层被施加到衬底上并且被构造为区分区域。在整个区域上应用第二层。这具有比第一层明显更大的折射率。首选功能:反射基板是抛光钢。高反射区域(12)的吸收层和最上层(16)由相同的材料构成。吸收和反射层的材料具有0.1-0.5的吸收系数k。高反射区域的层(15、16)具有明显不同的折射率,第一层(15)直接位于反射基板上,并且具有较小的折射率(n1)。这些层中的第二层具有不小于2.2的折射率n2。第二层(16)的厚度d2为30-50nm。第一层的折射率在1.3至1.7之间。第一层的厚度是100-150nm。高反射区域具有介电反射干扰滤波器构造。 PVD(等离子气相沉积)用于整体涂层,光刻用于结构化。第二层由PVD生产。在第一阶段中,将基材完全涂上光漆。这是结构化的,留下具有和不具有该涂层的区域。为了在上漆后构造第一层,去除了光漆和第一层共存的区域。

著录项

  • 公开/公告号DE50106355D1

    专利类型

  • 公开/公告日2005-07-07

    原文格式PDF

  • 申请/专利权人 DR. JOHANNES HEIDENHAIN GMBH;

    申请/专利号DE20015006355T

  • 发明设计人 FLATSCHER GEORG;

    申请日2001-03-01

  • 分类号G01D5/347;G01B11/02;

  • 国家 DE

  • 入库时间 2022-08-21 21:59:58

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