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process for the production of czochralski silicon without agglomierte eigenzwischengitteratom defects
process for the production of czochralski silicon without agglomierte eigenzwischengitteratom defects
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机译:无团聚体本征维氏缺陷原子缺陷的czochralski硅的生产方法
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摘要
A process for heat treating a silicon wafer to dissolve B-type agglomerated interstitial defects present therein. The process includes heating the silicon wafer at a temperature for a time sufficient to dissolve B-defects, the wafer being heated to said temperature at a rate sufficient to prevent B-defects from becoming stabilized such that these defects are rendered incapable of being dissolved.
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