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Method for the dosing of elements from a substrate for optical, electronic or opto-electronic applications

机译:用于从光学,电子或光电应用中的基板给料的配料方法

摘要

The invention concerns a method for measuring at least an element in a material (2) containing silicon, comprising the following steps: decomposing at least part of the material (2) with an etchant (6) to form a solution containing hexafluorosilicic acid (7) and the elements to be measured; heating said solution up to a temperature such that at least a substantial part of the hexafluorosilicic acid (7) is transformed into silicon tetrafluoride and a substantial part of the silicon tetrafluoride is evaporated, to obtain a measuring solution wherein the silicon content is substantially reduced while preserving the amount of each element to be measured; and measuring at least one element contained in the measuring solution. The invention is applicable in the field of manufacture of substrates or components for optics, electronics or optoelectronics, in particular for quality control.
机译:本发明涉及一种用于测量包含硅的材料(2)中的至少一种元素的方法,该方法包括以下步骤:用蚀刻剂(6)分解材料(2)的至少一部分以形成包含六氟硅酸(7)的溶液。 )以及要测量的元素;将所述溶液加热至一定温度,以使至少大部分六氟硅酸(7)转化为四氟化硅,并蒸发大部分四氟化硅,从而获得测量溶液,其中硅含量显着降低,同时保留要测量的每种元素的量;并测量所述测量溶液中包含的至少一种元素。本发明可应用于制造用于光学,电子或光电子学,特别是用于质量控制的衬底或组件的领域。

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