Micro-mirror for e.g. image projection system, has reflecting zone and electric control unit comprising two actuators, and movable electrode that is plated on fixed electrode when actuating voltage is applied between electrodes

摘要

The micro-mirror has a movable part (10) with reflecting zone and an electric control unit comprising two actuators (19). Each has a fixed electrode connected to a fixed part (14). A movable electrode (21) has a free end (21.1) and an end connected to a drive arm (23). The movable electrode is plated on the fixed electrode from the free end, when actuating voltage is applied between the electrodes. An independent claim is also included for a method of manufacturing a micro mirror.