Micro-mechanics component e.g. pressure sensor, has membrane with silicon dioxide layer provided on silicon substrate, and piezoelectric or piezo-resistive conducting strips integrated between silicon dioxide and silicon nitride layers

摘要

The component has a cavity (20) in a mono-crystalline silicon substrate (1). A membrane (M) is provided at the surface of the substrate to close the cavity. The membrane has a silicon dioxide layer (3) and a silicon nitride layer (7), where the layer (3) is provided on the substrate. Piezoelectric or piezo-resistive conducting strips (5a, 5b) are integrated between the layers and are provided on an edge zone (R) of the cavity. An independent claim is also included for a method of manufacturing a micro-mechanics component.