Sensor arrangement for oil condition sensor, has piezoelectric layer made of aluminum nitride and arranged on base substrate material e.g. silicon material, where base material is made standard substrate material e.g. silicon material

摘要

The arrangement (10) has a base substrate material (1), and a piezoelectric layer (2) arranged on the substrate material, where the layer is made from piezoelectric material such as aluminum nitride. The base substrate material is made from a standard substrate material e.g. silicon material. A membrane structure, inter-digital structure and a thermo-resistive structure are monolithically integrated for determining physical and chemical parameters of the medium at the sensor arrangement. Independent claims are also included for the following: (1) a medium condition sensor, in particular, oil condition sensor with a sensor arrangement (2) a method of manufacturing a sensor arrangement.