LASER TREATMENT SYSTEM, LASER SYSTEM, EXPOSING SYSTEM, EXPOSING METHOD, AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To prevent the working efficiency of a treatment equipment from reducing when any laser apparatus stops without being involved in an increase in cost because of the increasing of the number of the laser equipments.;SOLUTION: The laser apparatuses 15a to 15c are located with the same number of the exposing apparatuses 12a to 12c. When any laser apparatus (e.g. laser apparatus 15a) stops due to failure or maintenance etc., an exposure controller 11 synchronizes with the working state of the exposing apparatus 12a to 12c to control driving mirrors 16a to 16c of a distributor 14, and the laser beams from the other laser apparatuses 15b, 15c are supplied to the stopped exposing apparatus 12a corresponding to the suspended laser apparatus 15a. The exposure controller 11 performs the above control, for example, when the exposing apparatus 12b does not need a supply of a laser beam for a time because of lot exchange etc.;COPYRIGHT: (C)2007,JPO&INPIT