METHOD FOR FORMING SURFACE OF ALUMINUM OR ALUMINUM ALLOY SUPPRESSING ELECTRIFICATION, AND ALUMINUM OR ALUMINUM ALLOY MEMBER SUPPRESSING ELECTRIFICATION

摘要

PROBLEM TO BE SOLVED: To provide a method of forming an aluminum surface of suppressing electrification for solving trouble caused by static electricity generated on the surface of aluminum used in a process of producing a semiconductor or a liquid crystal display.;SOLUTION: For suppressing the contact/peeling electrification causing the generation of static electricity in the surface of aluminum, a rough surface having rough ruggedness with the average surface roughness (Ra) of ≥5 microns is formed on the surface of aluminum, and a contact area is reduced, so as to suppress electrification quantity. Further, electrically conductive alumite whose electric conductivity is improved is formed on an alumite film as a nonconductor, so as to control the electric resistance value of the film to a semiconductor region, thus electric charges are mildly removed by the moderate electric conductivity of the film. As a result, dielectric breakdown caused by sparks is suppressed.;COPYRIGHT: (C)2007,JPO&INPIT