SIMULTANEOUS DETERMINATION METHOD AND DEVICE OF FILM THICKNESS AND DIELECTRIC CONSTANT DISPERSION OF LANGMUIR-BLODGETT FILM

摘要

PPROBLEM TO BE SOLVED: To provide a simultaneous determination method of the film thickness and dielectric constant dispersion of a Langmuir-Blodgett film, improved so as to be able to determine simultaneously dielectric constant tensor and the film thickness of a transparent film or an absorption film deposited on a transparent substrate. PSOLUTION: This method comprises the first step for measuring a transmission spectrum of the substrate by changing an incidence plane, an incident angle and a polarization state, to thereby acquire measurement data; the second step for measuring a reflection spectrum of the substrate by changing the incidence plane, the incident angle and the polarization state, to thereby acquire measurement data; the third step for measuring a transmission spectrum of a sample formed by sticking a thin film onto the substrate in the same condition as the first step, to thereby acquire measurement data; the fourth step for measuring a reflection spectrum of the sample in the same condition as the first step, to thereby acquire measurement data; and the fifth step for executing operation processing by a method of least squares to the measurement data acquired in each step, to thereby determine the film thickness, an anisotropic dielectric constant value in an optical frequency domain and its dispersed dielectric constant together. PCOPYRIGHT: (C)2006,JPO&NCIPI