METHOD FOR MANUFACTURING RESIN-MADE MICRO FLOW PASSAGE CHEMICAL DEVICE AND STRUCTURE OF RESIN-MADE MICRO FLOW PASSAGE CHEMICAL DEVICE MANUFACTURED THEREBY

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a micro flow passage chemical device having specific high quality in large quantities inexpensively in a short period of time in order to solve the preblem of the conventional micro flow passage chemical device that an inorganic material is used mainly from standpoints of the workability and accuracy however it is difficult to form a micro flow passage and obtain specific joining strength and it takes much times to manufacture the micro flow passage chemical device.;SOLUTION: The method for manufacturing the resin-made micro flow passage chemical device is provided by which a substrate which is made of resin and is formed with a groove for a micro flow passage and a cover substrate which is made of the resin and is used for forming the groove into the micro flow passage are joined to each other, the resin capable of being joined by being subjected to irradiation of ultraviolet rays in vacuum and pressurization. The method comprises the steps of: pretreating the substrate and the cover substrate by irradiating the surfaces to be joined of these substrates with ultraviolet rays (having 200-120 nm, preferably, 172 nm wavelength, for example) in vacuum; laminating these substrates thus irradiated on each other; and joining the laminated substrates to each other by heating them to the temperature lower than the plastic deformation temperature of the resin or pressurizing them without heating them. The micro flow passage chemical device manufactured by this method is excellent in stability of a cross-sectional structure of the micro flow passage and pressure-resistant performance. The micro flow passage chemical device can be easily manufactured inexpensively according to this simple method.;COPYRIGHT: (C)2006,JPO&NCIPI