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TOP CONTACT TYPE FIELD EFFECT TRANSISTOR AND METHOD OF MANUFACTURING THE SAME TOP CONTACT TYPE FIELD EFFECT TRANSISTOR

机译:顶部接触型场效应晶体管及制造相同顶部接触型场效应晶体管的方法

摘要

PROBLEM TO BE SOLVED: To provide a method of forming two or more metals in a narrow pitch on an organic material layer, etc.;SOLUTION: The method of forming at least two metals 6 on at least one organic material layer 5, with the shortest distance between the metals larger than zero and not more than 100 μm, is provided. This method employs a substrate having a bridge structure 4 which consists of an upright portion extended upwards from the surface of the substrate and a crossing portion which is extended from the upright portion and crosses the substrate so as to divide a space above the substrate into two, and includes a process wherein an organic material 5 is so evaporated on the substrate as to continuously coat the surface of the substrate divided into two and the surface of the substrate below the crossing portion, and a process wherein a metal 6 is evaporated on the organic material 5 from a predetermined direction above the crossing portion after evaporating the organic material 5.;COPYRIGHT: (C)2006,JPO&NCIPI
机译:解决的问题:提供一种在有机材料层等上以窄间距形成两种或更多种金属的方法;解决方案:在至少一个有机材料层5上形成至少两种金属6的方法,其中提供了大于零且不大于100μm的金属之间的最短距离。该方法采用具有桥接结构4的基板,该桥接结构4包括从基板的表面向上延伸的直立部分和从该直立的部分延伸并与基板相交的交叉部分,以便将基板上方的空间分成两部分。包括使有机材料5在基板上蒸发以连续涂覆分为两部分的基板表面和在交叉部分下方的基板表面的工艺,以及使金属6在基板上蒸发的工艺。在蒸发有机材料5之后,从交叉部分上方的预定方向上的有机材料5中获得。;版权所有:(C)2006,JPO&NCIPI

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