CAPACITIVE MICROMACHINE ULTRASONIC VIBRATOR AND ITS MANUFACTURING METHOD, AND ULTRASONIC TRANSDUCER ARRAY

摘要

PROBLEM TO BE SOLVED: To provide a capacitive micromachine ultrasonic vibrator in which a vibrating membrane is arranged on a base plate having a backing function, and to provide a method of manufacturing it.;SOLUTION: The capacitive micromachine ultrasonic vibrator includes the base plate 30 formed of a material containing a resin, and a vibrator cell 10 arranged at the base plate 30. Further, the vibrator cell includes a lower electrode 25, a support section 23a and a beam 23b formed integrally, a vibrating membrane 23 arranged via an air gap 15 between upper electrodes 22, when this beam 23b is supported by the supporter 23a and the upper electrode 22 formed in this vibrating membrane 23.;COPYRIGHT: (C)2006,JPO&NCIPI