Method of manufacturing a capacitive ultrasonic transducer, the ultrasound endoscope apparatus equipped with a capacitive ultrasonic vibrator manufactured by the manufacturing method, a capacitive and greater capacitive ultrasonic probe ultrasonic transducer

摘要

The substrate 2 and the membrane 9 on the surface of the ultrasonic transmitting and receiving side, to form an electrode 7 of one cavity 13 that is configured on the back, and is placed support them, has been disposed an electrode 12 of the other on the surface a capacitive ultrasonic transducer comprising a capacitive ultrasonic transducer, characterized in that the membrane 9 is composed of a plurality of layers, at least one layer of which is made of a high dielectric constant 8 The, was it possible to obtain high sound pressure in a high frequency range.