STANDARD GAS PREPARING APPARATUS AND CAPACITY INSPECTION DEVICE USING IT

摘要

PPROBLEM TO BE SOLVED: To provide a standard gas preparing apparatus capable of arbitrarily combining a plurality of kinds of gases corresponding to a user's demand and preparing a standard gas containing a plurality of kinds of the gases simply and efficiently. PSOLUTION: The standard gas preparing apparatus is equipped with a reagent distribution means 1 having reagent containers 2 (e.g., 2a-2n) capable of housing a plurality of liquid reagents and distributing the proper amounts of the liquid reagents from the respective reagent containers 2 to supply them, an evaporation chamber 3 having an evaporation receiver 4 on which each of the liquid reagents distributed from the reagent distribution means 1 is dripped and perfectly evaporating each of the liquid reagents dripped on the evaporation receiver 4, the dilution chamber 5 communicating with the evaporation chamber 3 to dilute the evaporated gas evaporated in the evaporation chamber 3, a diluting gas supply means 6 for supplying a proper amount of a diluting gas to the dilution chamber 5 and the standard gas discharge means 7 allowed to communicate with and connected to the dilution chamber 5 to discharge a standard gas that is the mixture of the evaporated gas evaporated in the evaporation chamber 3 and the diluting gas in the dilution chamber 5. PCOPYRIGHT: (C)2006,JPO&NCIPI