OBSERVATION DEVICE OF NANOLEVEL STRUCTURAL COMPOSITION AND OBSERVATION METHOD OF NANOLEVEL STRUCTURAL COMPOSITION

摘要

PPROBLEM TO BE SOLVED: To facilitate the alignment of a sample probe while preventing contamination or oxidation in the atmosphere in an observation device of a nanolevel structural composition and an observation method of the nanolevel structural composition. PSOLUTION: A sample processing means 3 is provided in opposed relation to the sample probe part 2 of the observation device of the nanolevel structural composition. PCOPYRIGHT: (C)2006,JPO&NCIPI