METHOD FOR MANUFACTURING CIS GROUP THIN FILM SOLAR BATTERY AND APPARATUS FOR STORING PARTIALLY FABRICATED ITEM FOR SOLAR BATTERY

摘要

PPROBLEM TO BE SOLVED: To prevent a partially fabricated item for a CIS group thin film solar battery from reacting to humidity in atmosphere by using a simple and inexpensive method. PSOLUTION: It is ascertained that reaction between a partially fabricated item and humidity in atmosphere is generated in the storing and carrying of the partially fabricated article in film forming processes. Consequently, the partially fabricated item for the CIS group thin film solar battery is stored under an environment where humidity is uniformly managed at 30% relative humidity by a gas supply means of dry air or the like and a circulation means such as a fan in storing processes (a) to (f) or a carrying process to prevent the partially fabricated item from reacting with humidity in atmosphere. PCOPYRIGHT: (C)2006,JPO&NCIPI