PROBLEM TO BE SOLVED: To compensate large wavefront aberration by facilitating manufacture.;SOLUTION: A wavelength selection phase plate 12 with thickness in a transmitting plane different in each area reduces a large wavefront aberration by changing a phase distribution of transmitting wavefronts only to a beam of a certain specific wavelength. A liquid crystal layer 10 provided as a cell 10a in each area reduces a residual aberration to be a wavefront aberration compensation element 7 with a wide aberration compensation range. Since the number of steps in a thickness direction of the transmitting plane in the wavelength selection phase plate 12 can be reduced by compensating the residual aberration by the liquid crystal layer 10 provided as a cell 10a, it is possible to make it easy to manufacture the wavefront aberration compensation element 7.;COPYRIGHT: (C)2006,JPO&NCIPI
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