WORKPIECE POSITIONING STAGE AND ARM FOR WORKPIECE POSITIONING STAGE

摘要

PROBLEM TO BE SOLVED: To develop a workpiece positioning stage capable of fixing a motor to move a table, with no trouble due to movement of the motor, easy to control the motor and with no backlash to generate.;SOLUTION: The table is provided on an upper part of a shaft 3 free to slide in the both XY directions, and two pieces of arms 5 base end parts of which are supported free to revolve are provided crossed in an X shape. Slots 6 through insides of which the shaft slides are provided on the arms, and the shaft is inserted through the slots at a crossing part of each of the slots of the arms. The table moves to an optional position as two pieces of the arms are revolved. There is no trouble due to the movement of the motor as the motor 7 is fixed and does not move, and it is extremely easy to control the driving motor as rotating speed of the arms is completely optional in moving the table to the optional position.;COPYRIGHT: (C)2006,JPO&NCIPI