TANGIBLE COMPONENT ANALYZER AND TANGIBLE COMPONENT ANALYSIS METHOD

摘要

PROBLEM TO BE SOLVED: To acquire clear static picture image by rapidly and accurately focusing on a tangible component at an imaging position to perform efficient analysis processing.;SOLUTION: This tangible component analyzer is equipped with: a unified plate 122 comprising an imaging base surface for thereon spreading a supplied test liquid in order to image the test liquid; an imaging stage 121 for thereon holding the unified plate 122; an imaging part 131 for imaging the tangible component of the test liquid spread in a static state on the base surface of the unified plate 122; a control part 171 for previously detecting a height correction value for focusing the imaging part 131 on the tangible component of the test liquid to relatively move/control the imaging part 131 or imaging stage 121 in the height direction by using the correction value when imaging the test liquid by the imaging part 131; an XY stage 142; and a Z stage 143.;COPYRIGHT: (C)2006,JPO&NCIPI