THREE-AXIS MAGNETIC DETECTING ELEMENT, THREE-AXIS MAGNETIC DETECTING DEVICE AND MANUFACTURING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To realize a structure of a compact three-axis magnetic detecting element holding assembling strength, and to realize the three-axis magnetic detecting element and a three-axis magnetic detecting device which has taken mass productivity into consideration, and to provide a manufacturing method therefor.;SOLUTION: In the three-axis magnetic detecting element, having a structure configured so that one-axis magnetic detecting elements 1a, 1b and 1c made up of a glass substrate, a silicon wafer or a ceramic substrate are arranged on sidewalls of a nonmagnetic regular triangular prism 100 respectively one by one, electrical connections from the electrodes of the one-axis magnetic detecting elements are made, by using a printed circuit board or a lead frame 3. Furthermore, one coil 2 for applying a bias magnetic field which is to be shared with respect to the three one-axis magnetic detecting elements is disposed therein, whereby the three-axis magnetic detecting element has a single packaged structure which can be mounted on the printed circuit board.;COPYRIGHT: (C)2006,JPO&NCIPI