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METHOD OF MANUFACTURING MAGNETIC FIELD DETECTING ELEMENT, MAGNETIC FIELD DETECTING ELEMENT, LAMINATE, WAFER, HEAD GIMBAL ASSEMBLY AND HARD DISC DEVICE
METHOD OF MANUFACTURING MAGNETIC FIELD DETECTING ELEMENT, MAGNETIC FIELD DETECTING ELEMENT, LAMINATE, WAFER, HEAD GIMBAL ASSEMBLY AND HARD DISC DEVICE
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机译:制造磁场检测元件,磁场检测元件,叠层,晶片,磁头陀螺组件和硬盘装置的方法
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摘要
PROBLEM TO BE SOLVED: To suppress magnetostriction and obtain high MR (magnetoresistance) ratio in a magnetic field detecting element for CPP-GMR (current perpendicular to plane-giant magnetoresistive) head.;SOLUTION: The method of manufacturing the magnetic field detecting element comprises a step of forming a lamination film in which a pinned layer 7, a spacer layer 8, a spacer neighborhood layer 91 neighbored to the spacer layer 8, a metal layer 92, and a Heusler alloy layer 93 are neighbored sequentially in this sequence; and a step of forming a free layer 9 consisting of the spacer neighborhood layer 91, the metal layer 92, and the Heusler alloy layer 93 by applying heat treatment on the lamination film. The spacer neighborhood layer 91 is the layer having body-centered cubic structure consisting of the principal components of cobalt and iron, while the metal layer 92 is the layer consisting of either one of silver, gold, copper, paladium or platinum or the same is the layer consisting of an alloy of these metals.;COPYRIGHT: (C)2008,JPO&INPIT
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