PRESSURE REGULATING VALVE, FUNCTIONAL LIQUID SUPPLY MECHANISM EQUIPPED WITH THE SAME, DROP DELIVERY DEVICE, METHOD FOR MANUFACTURING OPTOELECTRONIC DEVICE, OPTOELECTRONIC DEVICE AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a pressure regulating valve for suppressing the generation of air bubbles, a functional liquid supply mechanism equipped with this, a liquid drop delivery device, a method for manufacturing optoelectronic device, optoelectronic device and electronic equipment.;SOLUTION: This pressure regulating valve 7 supplies functional liquid introduced from a functional liquid tank 91 to a primary chamber 122 through a secondary chamber 123 to a functional drop delivery head 11 with a power of gravity, and a valve body 126 is opened/closed so that the pressure of the secondary chamber 123 can be adjusted by using an atmospheric pressure as an adjustment reference pressure by a circular diaphragm 125 of the secondary chamber 123, and an inflow channel 148 communicating an inlet 147 connected to the functional liquid tank with a primary chamber side opening 149 opened at an upper end 153 of the primary chamber 122 is formed at a down-grade, and an outflow channel 180 communicating an outlet 178 communicating secondary chamber side opening 179 opened at a lower end 175 of the secondary chamber 123 with the functional drop delivery head 11 is formed at the down-grade.;COPYRIGHT: (C)2006,JPO&NCIPI