FOCUSING ION BEAM WORKING METHOD AND FOCUSING ION BEAM WORKING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a focusing ion beam working method and a device wherein a three-dimensional shape at beam working can be measured in an in-line system with a high precision, and nano three-dimensional casting mold with the high precision can be carried out without slanting or moving a worked object mechanically, and even if one secondary electron detector is used.;SOLUTION: In carrying out a removal work of the three-dimensional shape by irradiating the ion beam, it is irradiated on the same point of the worked object by normal irradiation and bent and inclined irradiation, and by measuring secondary electrons emitted from a work point by the secondary detector, the shape of the ion beam worked part is measured.;COPYRIGHT: (C)2006,JPO&NCIPI