PARALLEL MAGNETIC FIELD TYPE RUTHERFORD BACK-SCATTERING ANALYZER

摘要

PROBLEM TO BE SOLVED: To provide a parallel magnetic field type Rutherford back-scattering analyzer capable of distinguish the number of cyclotron circulations of scattered ions without providing unnecessary devices in the inside of a superconductive spectrometer.;SOLUTION: An ion beam is pulsed before the ion beam enters into a superconductive spectrometer, and the time elapsed since the ion beam is pulsed until scattered ions scattered in a sample is detected by a detector is measured, and thereby, the time of flight of the scattered ions is measured to distinguish the number of cyclotron circulations of the scattered ions from the time of flight.;COPYRIGHT: (C)2006,JPO&NCIPI