PARALLEL MAGNETIC FIELD TYPE RUTHERFORD BACK SCATTERING ANALYZER, ENERGY SPECTRUM MEASURING METHOD FOR SCATTERED ION USING IT AND CRYSTAL AXIS DETECTING METHOD FOR SAMPLE USING IT

摘要

PROBLEM TO BE SOLVED: To align a crystal axis and an ion beam by segregating scattered ions different in the number of convergences, easily measuring an energy spectrum in high resolution and detecting the crystal axis of a sample without labor and causing contamination in the sample in regard to a parallel magnetic field type Rutherford back scattering analyzer converging scattered ions back- scattered from a sample entered by the ion beam to a beam axis by a magnetic field parallel with the ion beam.;SOLUTION: The scattered ions are segregated to improve penetration of scattered ions with a small angle of incidence by using a pair of cylindrical members arranged in parallel with the beam axis of the ion beam with a predetermined interval. By using a two-dimensional scattered ion detector 8, the energy spectrum is measured on the basis of a detection position of the scattered ions, the crystal axis of the sample is detected on the basis of a detection amount distribution of the scattered ions, and the crystal axis and the beam axis of the ion beam are aligned.;COPYRIGHT: (C)2003,JPO