PARALLEL MAGNETIC FIELD RUTHERFORD BACK-SCATTERING ANALYSIS APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a parallel magnetic field Rutherford back-scattering analysis apparatus having a scattered ion detector for eliminating a complicated apparatus structure and complicated detecting operation, accurately detecting a location of a scattered ion, discriminating the scattered ion having different convergence times, detecting energy of the scattered ion and extending a range of an energy spectrum.;SOLUTION: In the parallel magnetic field Rutherford back-scattering analysis apparatus, the scattered ion detector uses a semiconductor detector 1. An annular electrode 3 is mounted on one detecting face 1a. A fan electrode 4 is mounted on the other detecting face 1b. Pulse amplifiers 6a-6d are connected to end electrodes 3a, 3b, 4a, 4b. An energy discriminating circuit and a location calculating circuit are provided on the output side. The parallel magnetic field Rutherford back-scattering analysis apparatus has a function for detecting two-dimensional (R-θ) location information of the scattered ion and a function for discriminating the quantity of energy, convergence times, etc. The apparatus structure is not complicated, and an analysis range and measuring accuracy are improved.;COPYRIGHT: (C)2005,JPO&NCIPI