EASILY ALTERABLE INTERCONNECT STRUCTURE, DESIGN OF INTERCONNECT STRUCTURE, AND METHOD OF ITS ALTERATION DESIGN

摘要

PROBLEM TO BE SOLVED: To provide an interconnect structure that is easy in altering the design, and a method of altering its design.;SOLUTION: The method includes a first design step for determining placement information of the interconnect structure which includes lower interconnects, auxiliary lower interconnects, via plugs, and upper interconnects, and a second design step for altering the placement information of the interconnect structure. In this case, the first design step determines the placement information of the lower interconnects and the auxiliary lower interconnects, determines the placement information of the via plugs that are superimposed on the lower interconnects and on the auxiliary lower interconnects, and includes the step for determining the placement information of the upper interconnects that are superimposed on the via plugs. The second design step changes the placement information of the upper interconnects so that the upper interconnects can be superimposed on predetermined via plugs by utilizing the auxiliary lower interconnects.;COPYRIGHT: (C)2006,JPO&NCIPI