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CHAMBER FOR LIQUID INSPECTION, LIQUID ANALYZING APPARATUS USING CHAMBER FOR LIQUID INSPECTION, AND THICKNESS MEASUREMENT METHOD OF CHAMBER FOR LIQUID INSPECTION
CHAMBER FOR LIQUID INSPECTION, LIQUID ANALYZING APPARATUS USING CHAMBER FOR LIQUID INSPECTION, AND THICKNESS MEASUREMENT METHOD OF CHAMBER FOR LIQUID INSPECTION
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机译:液体检查室,使用液体检查室的液体分析装置以及液体检查室的厚度测量方法
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摘要
PROBLEM TO BE SOLVED: To provide a chamber for liquid inspection with less error of chamber thickness.;SOLUTION: The chamber for liquid inspection comprises a base substrate 11 and an upper cover 13 stuck to the upper part of the base substrate 11 through an adhesive layer 12, and a first recessed part 14 is disposed on the base substrate 11 side of the upper cover 13. The chamber further comprises a first chamber 15 formed by this first recessed part 14 and the base substrate 11, a second recessed part 18 having a thickness different from that of the first recessed part 14 to be connected to the upper cover 13, and a second chamber 19 formed of the second recessed part 18 and the base substrate 11. Thus, the chamber for liquid inspection with the small thickness error can be provided.;COPYRIGHT: (C)2006,JPO&NCIPI
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