On the semiconductor matsuhatsuenda die

摘要

PROBLEM TO BE SOLVED: To enable a semiconductor Mach-Zehnder optical modulator useful for a long distance and large capacity optical communication system to be push-pull-driven at a high speed and a lower driving voltage when the semiconductor Mach-Zehnder optical modulator is constituted so as to be push-pull- driven.;SOLUTION: A grounding electrode 5, a high conductivity layer 7, a signal electrode 4, a high conductivity layer 8 and a grounding electrode 6 are arranged on a semiconductor substrate 1 in order, optical waveguides 2, 3 consisting of pin type semiconductor layers are arranged on the high conductivity layers 7, 8 respectively, distribution electrodes 9, 10 are arranged on the optical waveguides 2, 3 respectively and distribution electrodes 11, 12 are arranged on the high conductivity layers 7, 8 respectively.;COPYRIGHT: (C)2004,JPO