Method and the device in order to control production process on the basis of the electric quality which was requested with measurement

摘要

Method of this invention, following to operational reshipi, has the step which one executes the process which forms the structure of the semiconductor device at least. Electric performance characteristic of this structure is measured. Set point of electric performance characteristic and that electric performance characteristic which were requested with measurement is compared. On the basis of this comparison, operation reshipi one parameter is decided at least. The system (10,100), the process device (30 - 80,200,210,220,230), the measuring device (30 - 80,250) and the controller (140) it has. The process device (30 - 80,200,210,220,230), following to operation reshipi, in order one to execute the process which forms the structure of the semiconductor device at least, it is constituted. The measuring device (30 - 80,250), in order to measure the electric performance characteristic of structure, it is constituted. The controller (140), comparing with the set point of electric performance characteristic and that electric performance characteristic which were requested with measurement, in order to decide at least one parameter of operation reshipi on the basis of this comparison, it is constituted.