As it improves cooling power, the design and its related method of the target which makes deflecting and becoming deformed decrease

摘要

a) target surface element and b which have the target material) it possesses the connected surface and the rear, it is connected to the rear of the core reverse side hitting element and c) core reverse side hitting element where the connected surface is connected to the target surface element is arranged, it has one which makes the effective surface area of the core reverse side hitting element increase surface area form at least. As for the addition sputtering target, a) the target surface element and the core reverse side hitting element have the same target material, or material slope is had, target surface element and core reverse side hitting element and b of one somatotype) is on the core reverse side hitting element, or are unified in, the sputtering target which at least has one which makes the effective element of the core reverse side hitting element increase surface area form, is explained here. Furthermore formation method of the sputtering target which is explained, as a) thing and b which offer the target surface element which has the surface material) it has the reverse side hitting material, is connected to the rear of the thing and c) core reverse side hitting board which offer the connected surface and the core reverse side hitting element which possesses the rear is arranged, offers one which makes the effective surface area of the core reverse side hitting board increase surface area form at least, or, is connected to the connected surface of the core reverse side hitting element, or is arranged, offers one which makes the effective surface area of the core reverse side hitting element increase surface area form at leastWith, d) the fact that the surface target material is connected to the connected surface of the core reverse side hitting material is had.